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Evaluation Technology
HIGH ACCURANCY EVALUATION TECNOLOGY WITH OWN TECHNOLOGY
Our products is manufacturing with high accuracy evaluation technology based on own technology. The quality is preserved by this technology with tough standard.


Characteristic
Dimension Evaluation Various types of measuring instruments such as 2D and 3D measuring instruments, surface roughness tester, and coating thickness meter
Vacuum Evaluation Vacuum leak, ultimate vacuum, gas discharge characteristic
Temperature Evaluation Surface temperature distribution measurement by IR thermograph (inside a vacuum chamber) Temperature distribution measurement of the heater using various temperature-measuring tools and a wafer stage
Surface Analysis SEM, EPMA, X-ray Fluorescence Spectrometer,Sequential Plasma Spectrometer